Hydrogen concentrations in ZnO single crystals exposing different surfaces have been determined to be in the range of (0.02–0.04) at.% with an error of ±0.01 at.% using nuclear reaction analysis. In the subsurface region, the hydrogen concentration has been determined to be higher by up to a factor of 10. In contrast to the hydrogen in the bulk, part of the subsurface hydrogen is less strongly bound, can be removed by heating to 550°C, and reaccommodated by loading with atomic hydrogen. By exposing the ZnO(10-10) surface to water above room temperature and to atomic hydrogen, respectively, hydroxylation with the same coverage of hydrogen is observed.